Research of chemical reactions and physical conditions downstream from deposition and etch chambers.
Development, proof of concept and HVM validation of process material reclaim technologies
Enhanced capability to study and analyze reactivity of reaction by products
Practical maintenance skills acquisition by engineering students and customer employees
Expand academic research in bio-tech and photo-catalysis to abate HAP/GWG Reduce development cycle of new generations of zero-carbon emitting abatement
Technical and technological validation of new equipment and components compatibility with harsh process applications at HVM-like conditions
